The TU Delft Department of ESE and Microelectronics harbours multiple laboratories with state-of-the-art deposition and characterizing tools that are essential for both research and education purposes. These characterization facilities are used to study a large range of different materials mainly Si based layers and devices as well as micro electromechanical devices and Perovskite materials. Currently we w...

The TU Delft Department of ESE and Microelectronics harbours multiple laboratories with state-of-the-art deposition and characterizing tools that are essential for both research and education purposes. These characterization facilities are used to study a large range of different materials mainly Si based layers and devices as well as micro electromechanical devices and Perovskite materials. Currently we want to replace our existing RAMAN and AFM measuring tools.Both for our research as well as for teaching, it is necessary that we are able to use the systems with the same operating and data-collection software. In addition, we seek to have a system that gives the possibility to preform combined measurements (TERS and colocalized) as well as parallel measurements. The TU Delft Department of ESE and Microelectronics harbours multiple laboratories with state-of-the-art deposition and characterizing tools that are essential for both research and education purposes. These characterization facilities are used to study a large range of different materials mainly Si based layers and devices as well as micro electromechanical devices and Perovskite materials. Currently we want to replace our existing RAMAN and AFM measuring tools.Both for our research as well as for teaching, it is necessary that we are able to use the systems with the same operating and data-collection software. In addition, we seek to have a system that gives the possibility to preform combined measurements (TERS and colocalized) as well as parallel measurements.

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